QUANTITATIVE ELECTRON-PROBE MICROANALYSIS OF NOBLE-GASES IN SPUTTERED LAYERS OF SEMICONDUCTORS

被引：3

|

作者：

KUCHLER, L

HUNGER, HJ

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1979年 / 54卷 / 02期

关键词：

D O I：

10.1002/pssa.2210540258

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：K141 / K144

页数：4

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