DEPTH PROFILING OF DEFECTS IN A-SIH FILMS BY MEANS OF MODULATED PHOTOCURRENT

被引:3
|
作者
AMATO, G [1 ]
GIORGIS, F [1 ]
FIZZOTTI, F [1 ]
MANFREDOTTI, C [1 ]
机构
[1] UNIV TURIN,DEPT EXPTL PHYS,I-10125 TURIN,ITALY
关键词
D O I
10.1016/0038-1098(93)90372-T
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
This work reports about experimental findings obtained by means of Modulated Photocurrent (MPC) spectroscopy as applied to a-Si:H films in sandwich configuration. The gap density of states from 0.4 to 0.7 eV below the conduction band edge has been recontructed for three excitation wavelengths. This allows for a spatial depth profiling of unoccupied defects. It is shown that the defects peak apparently shifts towards midgap when probing the region near a-Si:H-metal interface. This result is interpreted by means of two different models. The likelihood of these models is discussed by comparing the results with other spectroscopic data.
引用
收藏
页码:277 / 280
页数:4
相关论文
共 50 条
  • [1] DECAY OF PHOTOCURRENT FROM THE STEADY-STATE IN A-SIH FILMS
    ZHOU, JH
    ELLIOTT, SR
    [J]. PHYSICAL REVIEW B, 1992, 46 (19): : 12402 - 12410
  • [2] PHOTOINDUCED DEFECTS IN PSEUDODOPED A-SIH
    GOLIKOVA, OA
    IKRAMOV, RG
    KAZANIN, MM
    MEZDROGINA, MM
    [J]. SEMICONDUCTORS, 1993, 27 (03) : 265 - 267
  • [3] THE STUDY OF CARRIER TRANSPORT IN THIN A-SIH FILMS BY THE AID OF TRANSIENT AND STEADY-STATE PHOTOCURRENT MEASUREMENT
    YAMAGUCHI, M
    TAKADA, J
    HOSOKAWA, Y
    TAWADA, Y
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 447 - 450
  • [4] EFFECT OF RF POWER ON THE MICROSTRUCTURE OF A-SIH FILMS
    AIDA, MS
    MIROUH, K
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1993, 136 (01): : K31 - K33
  • [5] PERSISTENT PHOTOCONDUCTIVITY IN DOPING-MODULATED THIN A-SIH MULTILAYERS
    KANG, SS
    YANG, SH
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1994, 27 (03) : 314 - 318
  • [6] BANDGAP FLUCTUATIONS IN COMPENSATED A-SIH (P, B) FILMS
    RATH, JK
    FUHS, W
    MELL, H
    [J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1993, 179 (01): : 83 - 90
  • [7] REVERSIBILITY OF THE LIGHT-INDUCED SATURATION AND ANNEALING OF DEFECTS IN A-SIH
    GLESKOVA, H
    MORIN, PA
    BULLOCK, J
    WAGNER, S
    [J]. MATERIALS LETTERS, 1992, 13 (4-5) : 279 - 283
  • [8] DETERMINATION OF ELECTRON-DIFFUSION LENGTH FROM PHOTOCURRENT CHARACTERISTICS OF THE STRUCTURE ITO A-SICH (P-TYPE) A-SIH A-SIH (N-TYPE) PD
    SERIN, T
    SERIN, N
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1994, 59 (04): : 431 - 433
  • [9] INFRARED REFLECTANCE SPECTROSCOPY OF VERY THIN-FILMS OF A-SIH
    MALEY, N
    SZAFRANEK, I
    MANDRELL, L
    KATIYAR, M
    ABELSON, JR
    THORNTON, JA
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 : 163 - 165
  • [10] DISORDER AND DEFECTS IN SPUTTERED A-SIH FROM SUBGAP ABSORPTION-MEASUREMENTS
    JOUSSE, D
    BUSTARRET, E
    BOULITROP, F
    [J]. SOLID STATE COMMUNICATIONS, 1985, 55 (05) : 435 - 438