EFFECT OF RF POWER ON THE MICROSTRUCTURE OF A-SIH FILMS

被引：1
|
作者：
AIDA, MS
MIROUH, K
机构：
[1] Unité de Recherche de Physique Des Matériaux Et Applications, Université de Constantine
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1993年 / 136卷 / 01期
关键词：
D O I：
10.1002/pssa.2211360142
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K31 / K33
页数：3
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