FLUORINATED DIAMOND-LIKE CARBON-FILMS DEPOSITS FROM RADIOFREQUENCY GLOW-DISCHARGE IN A TRIODE REACTOR

被引：86
|
作者：
DAGOSTINO, R [1 ]
LAMENDOLA, R [1 ]
FAVIA, P [1 ]
GIQUEL, A [1 ]
机构：
[1] UNIV PARIS 13,INGN MAT & HAUTES PRESS LAB,F-93430 VILLETANEUSE,FRANCE
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 02期
关键词：
D O I：
10.1116/1.578873
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Diamondlike carbon thin films have been deposited by H-2-C2F6 fed rf-glow discharges in a triode reactor. Raman spectroscopy and electron spectroscopy for chemical analysis have been utilized as diagnostic tools to investigate structural properties and chemical composition of deposited films. Transitions in film properties have been observed, from those typical of hydrogenated polymers to those of diamondlike and fluorinated polymers, by changing feed composition, substrate bias, and substrate temperature. In particular, it has been shown that the energy of the ions bombarding the growing films, as well as the fluorine contents in the films is the most critical parameter to obtain materials with diamondlike structure.
引用
收藏
页码：308 / 313
页数：6
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