YBA2CU3O7-X THIN-FILMS DEPOSITION ON YSZ SUBSTRATES BY MOCVD

被引：8
|
作者：
SANTISO, J
FIGUERAS, A
机构：
[1] C.S.I.C., Bellaterra
来源：
JOURNAL DE PHYSIQUE IV | 1993年 / 3卷 / C3期
关键词：
D O I：
10.1051/jp4:1993348
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The evaporation process of beta-diketonate precursors for the MOCVD deposition of YBa2Cu3O7-x superconducting films has been investigated by thermogravimetric analysis. Special attention has been paid to the Ba(thd)2 precursor. A simple model of the reactions involved in this process has been described. YBa2Cu3O7-x superconducting layers were deposited on YSZ substrates by MOCVD in a horizontal hot-wall reactor. Films showed a mixture of c-axis and a-axis orientation, and have a T(c)(R=0)= 88.2K and T(c) onset= 91.6K.
引用
收藏
页码：353 / 360
页数：8
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