RAPID PROTOTYPING OF SUBMICRON ICS USING FIB

被引：0
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作者：
PERRIN, D
SEIFERT, W
机构：
来源：
SOLID STATE TECHNOLOGY | 1994年 / 37卷 / 10期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：95 / 96
页数：2
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