Thermal combustion of exhaust gases in semiconductor production

被引：0
|
作者：
Strauss, S
Hofmann, G
Zschunke, T
Reichardt, H
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来源：
COMBUSTION AND INCINERATION | 1999年 / 1492卷
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中图分类号：
O414.1 [热力学];
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页码：711 / 716
页数：6
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