共 50 条
- [21] STRUCTURE OF SILICON-NITRIDE FILMS .2. NONSTOICHIOMETRIC SILICON-NITRIDE PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 51 (01): : 49 - 56
- [26] ON SILICON-NITRIDE CONDUCTIVITY PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 62 (02): : K131 - K134
- [29] ANALYSIS OF THE SHORT ORDER IN SILICON-NITRIDE FILMS DOKLADY AKADEMII NAUK SSSR, 1982, 266 (06): : 1381 - 1384