MAGNETRON SPUTTERED Al-ZnO THIN FILMS FOR PHOTOVOLTAIC APPLICATIONS

被引：0
|
作者：
Ray, J. R. [1 ]
Desai, M. S. [1 ]
Panchal, C. J. [1 ]
Patel, P. B. [2 ]
机构：
[1] Maharaja Sayajirao Univ Baroda, Dept Appl Phys, Vadodara 390001, India
[2] Sardar Patel Univ, Dept Elect, Vallabh Vidyanagar 388120, Gujarat, India
来源：
JOURNAL OF NANO- AND ELECTRONIC PHYSICS | 2011年 / 3卷 / 01期
关键词：
RF MAGNETRON SPUTTERING; Al-ZnO THIN FILM; STRUCTURAL; OPTICAL; ELECTRICAL; MORPHOLOGICAL CHARACTERIZATION;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The optimization process of the RF magnetron sputtered Al doped ZnO (AZO) thin films was carried out by studying its structural, optical, electrical, and morphological properties at different RF power and different working pressures for its use as a front-contact for the copper indium diselenide (CIS) based thin film solar cell. The structural study suggests that the preferred orientation of grains along the (002) plane having a hexagonal structure of the grains. The optical and electrical properties suggest that the films show an average transmission of 85 % and a resistivity of the order of 10(-4) Omega cm. The morphology analysis suggests the formation of packed grains having a homogeneous surface.
引用
收藏
页码：755 / 765
页数：11
相关论文
共 50 条
  • [1] RF magnetron-sputtered Al-ZnO/Ag/Al-ZnO (AAA) multilayer electrode for transparent and flexible thin-film heater
    Roul, Monee K.
    Pradhan, Sangram K.
    Song, Kyo D.
    Bahoura, Messaoud J.
    JOURNAL OF MATERIALS SCIENCE, 2019, 54 (09) : 7062 - 7071
  • [2] SPUTTERED OF ZnO: Al THIN FILMS FOR APPLICATION IN PHOTOVOLTAIC SOLAR CELLS
    Flickyngerova, Sona
    Rehakova, Anna
    Tvarozek, Vladimir
    Novotny, Ivan
    ADVANCES IN ELECTRICAL AND ELECTRONIC ENGINEERING, 2008, 7 (1-2) : 382 - 384
  • [3] Optical and electrical properties of RF magnetron sputtered ZnO:Al thin films
    Dimova-Malinovska, D
    Tzenov, N
    Tzolov, M
    Vassilev, L
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 52 (01): : 59 - 62
  • [4] Preparation of DC Reactive Magnetron Sputtered ZnO Thin Film Towards Photovoltaic Applications
    Prabhu, M.
    Sivanantham, A.
    Kannan, P. Karthick
    Vishnukanthan, V.
    Mayandi, J.
    PROCEEDING OF INTERNATIONAL CONFERENCE ON RECENT TRENDS IN APPLIED PHYSICS & MATERIAL SCIENCE (RAM 2013), 2013, 1536 : 531 - +
  • [5] The optical and electrophysical properties of Al-ZnO thin films
    Ignatieva, I. O.
    Volkova, M. G.
    Gulyaeva, I. A.
    Starnikova, A. P.
    Petrov, V. V.
    Bayan, E. M.
    MATERIALS TODAY-PROCEEDINGS, 2022, 52 : 191 - 194
  • [6] Effect of rf power on the properties of rf magnetron sputtered ZnO:Al thin films
    Saad, M.
    Kassis, A.
    MATERIALS CHEMISTRY AND PHYSICS, 2012, 136 (01) : 205 - 209
  • [7] Prepareation of Large Area Al-ZnO Thin Film by DC Magnetron Sputtering
    Jiao Fei
    Liao Cheng
    Han Jun-feng
    Zhou Zhen
    SPECTROSCOPY AND SPECTRAL ANALYSIS, 2009, 29 (03) : 698 - 701
  • [8] Optical Tailoring of RF Magnetron Sputtered ZnO Thin Films
    Hassan, A.
    Feng, C.
    Riaz, S.
    Naseem, S.
    Jiang, Y.
    33RD INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS, 2017, 864
  • [9] The annealing process of RF magnetron sputtered ZnO:Al films
    Yu Zhinong
    Xu Jin
    Xue Wei
    Li Jinwei
    AOE 2007: ASIA OPTICAL FIBER COMMUNICATION & OPTOELECTRONIC EXPOSITION & CONFERENCE, CONFERENCE PROCEEDINGS, 2008, : 552 - +
  • [10] Optical and electrical properties of R.F. magnetron sputtered ZnO:Al thin films
    Dimova-Malinovska, D.
    Tzenov, N.
    Tzolov, M.
    Vassilev, L.
    Materials science & engineering. B, Solid-state materials for advanced technology, 1998, B52 (01): : 59 - 62
12345