ANOMALOUS PUNCHTHROUGH IN ULSI BURIED-CHANNEL MOSFETS

被引:8
|
作者
SKOTNICKI, T
MERCKEL, G
PEDRON, T
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D O I
10.1109/16.43679
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:2548 / 2556
页数:9
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