THE SCIENCE AND ENGINEERING OF LARGE-DIAMETER CZOCHRALSKI SILICON CRYSTAL-GROWTH

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作者：
LIN, W
BENSON, KE
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来源：
ANNUAL REVIEW OF MATERIALS SCIENCE | 1987年 / 17卷
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T [工业技术];
学科分类号：
08 ;
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页码：273 / 298
页数：26
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