SMALL NB/AL-OXIDE/NB JOSEPHSON JUNCTION FABRICATION USING LIFT-OFF PROCESSES

被引:17
|
作者
YUDA, M
KURODA, K
NAKANO, J
机构
关键词
D O I
10.1143/JJAP.26.L166
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L166 / L168
页数:3
相关论文
共 50 条
  • [21] Modeling the Effect of Fabrication Process on Grain Boundary Formation in Nb/Al-AlOx/Nb Josephson Junction Circuit
    Pokhrel, Nimesh
    Weingartner, Thomas A.
    Sulangi, Miguel A.
    Patrick, Erin E.
    Law, Mark E.
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2021, 31 (05)
  • [22] Nb/AlOx-Al/Nb Josephson junction fabricated using facing target sputtering system
    Morohashi, S
    Ikuta, M
    Yamashita, N
    Miyoshi, T
    Takada, Y
    PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2005, 426 : 1519 - 1524
  • [23] STRUCTURE OF A NB OXIDE TUNNEL BARRIER IN A JOSEPHSON JUNCTION
    KUAN, TS
    RAIDER, SI
    DRAKE, RE
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) : 7464 - 7470
  • [24] Semiellipsoid microlens fabrication method using the lift-off and alignment exposure processes
    Hung, Chien-Hsin
    Hung, Shih-Yu
    Shen, Ming-Ho
    Yang, Hsiharng
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2012, 22 (10)
  • [25] Influence of the Al thickness of Nb/Al-AlOx/Nb Josephson junction on the magnetic field dependence of the Josephson current
    Kobayashi, Kazuki
    Nakayama, Akiyoshi
    Abe, Susumu
    Watanabe, Norimichi
    PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2020, 579
  • [26] FABRICATION AND PROPERTIES OF NB/AL, ALOX/NB JOSEPHSON TUNNEL-JUNCTIONS WITH A DOUBLE-OXIDE BARRIER
    HOUWMAN, EP
    VELDHUIS, D
    FLOKSTRA, J
    ROGALLA, H
    JOURNAL OF APPLIED PHYSICS, 1990, 67 (04) : 1992 - 1994
  • [27] Production of high quality Nb/Al-oxide/Nb SIS trilayers for submillimeter wave mixers
    Bloemhof, EE
    INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 1997, 18 (11): : 2177 - 2190
  • [28] Production of high quality Nb/Al-oxide/Nb SIS trilayers for submillimeter wave mixers
    E. E. Bloemhof
    International Journal of Infrared and Millimeter Waves, 1997, 18 : 2177 - 2190
  • [29] Fabrication and properties of large Josephson (Nb/Al-AlOx/Al)(n)/Nb multilayers
    Polcari, A
    Monaco, R
    APPLIED SUPERCONDUCTIVITY 1995, VOLS. 1 AND 2: VOL 1: PLENARY TALKS AND HIGH CURRENT APPLICATIONS; VOL 2: SMALL SCALE APPLICATIONS, 1995, 148 : 1447 - 1450
  • [30] OPTICAL ANALYSIS OF AL-LAYER OXIDATION DURING NB/AL2O3-AL/NB JOSEPHSON-JUNCTION FABRICATION
    DOLATA, R
    NEUHAUS, M
    JUTZI, W
    CRYOGENICS, 1994, 34 (10) : 833 - 835