PROBLEMS OF APPLICATION OF ION ETCHING OF SECTIONS

被引：0
|
作者：
VYPRYAZHKIN, VP
BRAZGIN, IA
KHABINSKAYA, NI
机构：
来源：
INDUSTRIAL LABORATORY | 1988年 / 54卷 / 08期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：955 / 956
页数：2
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