TRANSIENT CAPLESS ANNEALING OF ION-IMPLANTED GAAS

被引：7
|
作者：
CLARKE, RC
ELDRIDGE, GW
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1984年 / 31卷 / 08期
关键词：
D O I：
10.1109/T-ED.1984.21664
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1077 / 1082
页数：6
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