CRYSTAL-STRUCTURE AND SOFT MAGNETIC-PROPERTIES OF FEZRN/ALN MULTILAYER FILMS

被引:1
|
作者
TANEKO, N
SHIMADA, Y
FUKAMICHI, K
YOSHIHARA, A
MIYAKAWA, C
机构
[1] SUMITOMO MET MIN CO,ICHIKAWA,TOKYO 272,JAPAN
[2] TOHOKU UNIV,FAC ENGN,DEPT MAT SCI,SENDAI,MIYAGI 980,JAPAN
关键词
MULTILAYER FILM; AIN FILM; MAGNETIC SOFTNESS; FINE-GRAINED FILM; NITRIDE FILM;
D O I
10.1143/JJAP.30.1687
中图分类号
O59 [应用物理学];
学科分类号
摘要
Soft magnetic properties of Fe-Zr-N fine-grained films multilayered with AlN films as spacers are investigated. AlN spacers with a thickness of 5 approximately 500 angstrom are studied. The magnetic softness and its thermal stability are dependent on the multilayer structure. This is because AlN spacers accelerate crystal growth of alpha-Fe, although they can be very thin, and improve the magnetic softness.
引用
收藏
页码:1687 / 1691
页数:5
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