KINETICS AND MORPHOLOGY OF ERBIUM SILICIDE FORMATION

被引：50
|
作者：
KNAPP, JA [1 ]
PICRAUX, ST [1 ]
WU, CS [1 ]
LAU, SS [1 ]
机构：
[1] UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92093
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 10期
关键词：
D O I：
10.1063/1.335640
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：3747 / 3757
页数：11
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