SURFACE-MORPHOLOGY OF ERBIUM SILICIDE

被引:63
|
作者
LAU, SS [1 ]
PAI, CS [1 ]
WU, CS [1 ]
KUECH, TF [1 ]
LIU, BX [1 ]
机构
[1] CALTECH,PASADENA,CA 91125
关键词
D O I
10.1063/1.93295
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:77 / 80
页数:4
相关论文
共 50 条
  • [1] SURFACE-MORPHOLOGY STUDY OF TITANIUM SILICIDE FORMED ON POLYCRYSTALLINE SILICON
    KARLIN, TE
    KAPLAN, W
    ZHANG, SL
    [J]. PHYSICA SCRIPTA, 1994, 54 : 38 - 41
  • [2] KINETICS AND MORPHOLOGY OF ERBIUM SILICIDE FORMATION
    KNAPP, JA
    PICRAUX, ST
    WU, CS
    LAU, SS
    [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (10) : 3747 - 3757
  • [3] SURFACE-MORPHOLOGY AND ELECTROMIGRATION
    HUANG, HL
    YANG, JS
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1487 - 1488
  • [4] THERMODYNAMICS OF SURFACE-MORPHOLOGY
    WILLIAMS, ED
    BARTELT, NC
    [J]. SCIENCE, 1991, 251 (4992) : 393 - 400
  • [5] HYDROGEN ADSORPTION ON ERBIUM SILICIDE SURFACE
    SAINTENOY, S
    WETZEL, P
    PIRRI, C
    PERUCHETTI, JC
    BOLMONT, D
    GEWINNER, G
    [J]. SOLID STATE COMMUNICATIONS, 1995, 94 (09) : 719 - 723
  • [6] SURFACE-MORPHOLOGY OF DIBLOCK COPOLYMERS
    SCHWARK, DW
    THOMAS, EL
    FETTERS, LJ
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1989, 197 : 222 - POLY
  • [7] SURFACE-MORPHOLOGY OF SIMOX WAFERS
    NAKASHIMA, S
    IZUMI, K
    [J]. PROCEEDINGS OF THE 7TH SYMPOSIUM ON ION BEAM TECHNOLOGY, 1989, : 91 - 100
  • [8] SURFACE-MORPHOLOGY OF OLFACTORY RECEPTORS
    KAUER, JS
    [J]. JOURNAL OF SUBMICROSCOPIC CYTOLOGY AND PATHOLOGY, 1983, 15 (01) : 167 - 171
  • [9] SURFACE-MORPHOLOGY OF SIMOX WAFERS
    NAKASHIMA, S
    IZUMI, K
    [J]. ELECTRONICS LETTERS, 1989, 25 (02) : 154 - 156
  • [10] ANNEALING, FLUX DIVERGENCE AND SURFACE-MORPHOLOGY
    HUANG, HL
    LIN, LC
    [J]. THIN SOLID FILMS, 1983, 108 (01) : 87 - 93