MEASUREMENT OF THE THICKNESS OF THIN-LAYERS BY ULTRASONIC INTERFEROMETRY

被引：12

|

作者：

HOUZE, M

NONGAILLARD, B

GAZALET, M

ROUVAEN, JM

BRUNEEL, C

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 01期

关键词：

D O I：

10.1063/1.332863

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：194 / 198

页数：5

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