ELLIPSOMETRIC AND OPTICAL STUDY OF AMORPHOUS HYDROGENATED CARBON-FILMS

被引：13
|
作者：
ALTEROVITZ, SA
WARNER, JD
LIU, DC
POUCH, JJ
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 11期
关键词：
D O I：
10.1149/1.2108403
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：2339 / 2342
页数：4
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