INFRARED AND ELLIPSOMETRIC STUDIES OF AMORPHOUS HYDROGENATED CARBON-FILMS

被引：13
|
作者：
SUNIL, D
VANKAR, VD
CHOPRA, KL
机构：
[1] Department of Physics, Indian Institute of Technology
来源：
JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 06期
关键词：
D O I：
10.1063/1.348464
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Amorphous hydrogenated carbon films have been deposited on a powered electrode by decomposition of acetylene in an rf discharge. Infrared and spectroscopic ellipsometry have been used to study the bonding characteristics and optical properties of these films. The films possess a mixture of bonding configurations which are very sensitive to discharge conditions. Large changes in refractive index and extinction coefficients have been observed. These changes are associated with ion-induced structural modifications and hydrogen incorporation during the deposition process.
引用
收藏
页码：3719 / 3722
页数：4
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