SPUTTERING IN HIGH-VOLTAGE ELECTRON-MICROSCOPE

被引：34

|

作者：

CHERNS, D ^{[1
]}

MINTER, FJ ^{[1
]}

NELSON, RS ^{[1
]}

机构：

[1] ATOM ENERGY RES ESTAB,DIV MET,HARWELL,OXFORDSHIRE,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS | 1976年 / 132卷 / JAN-F期

关键词：

D O I：

10.1016/0029-554X(76)90760-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：369 / 376

页数：8

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