BURIED SILICON-NITRIDE FORMED BY NITROGEN IMPLANTATION

被引：0

作者：

ZIMMER, G

VOGT, H

BELZ, J

TEKAAT, E

机构：

[1] UNIV DORTMUND,INST PHYS,D-4600 DORTMUND 50,FED REP GER

[2] FRAUNHOFER INST,IMS,D-4100 DUISBURG,FED REP GER

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C95 / C95

页数：1

共 50 条

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