POLARIZATION MODULATION FOURIER-TRANSFORM INFRARED ELLIPSOMETRY OF THIN POLYMER-FILMS

被引:13
|
作者
GRAF, RT [1 ]
ENG, F [1 ]
KOENIG, JL [1 ]
ISHIDA, H [1 ]
机构
[1] CASE WESTERN RESERVE UNIV, DEPT MACROMOLEC SCI, CLEVELAND, OH 44106 USA
关键词
D O I
10.1366/0003702864508818
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
PLASTICS FILMS
引用
收藏
页码:498 / 503
页数:6
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