ELECTRONIC SPUTTERING OF HALIDES BY LOW-ENERGY ION AND ELECTRON-BOMBARDMENT

被引：3
|
作者：
PORADZISZ, A
POSTAWA, Z
RUTKOWSKI, J
SZYMONSKI, M
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(88)90692-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：830 / 833
页数：4
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