Critical factors in quantitative Atomic Force Acoustic Microscopy

被引：6
|
作者：
Marinello, F. [1 ,2 ]
Schiavuta, P. [2 ]
Carmignato, S. [3 ]
Savio, E. [1 ]
机构：
[1] Univ Padua, DIMEG, Via Venezia 1, Padua, Italy
[2] CIVEN, Nanotechnol Ctr, Venice, Italy
[3] Univ Padua, DTG, Vicenza, Italy
来源：
CIRP JOURNAL OF MANUFACTURING SCIENCE AND TECHNOLOGY | 2010年 / 3卷 / 01期
关键词：
Atomic Force Acoustic Microscopy; Quantitative mapping; Contact stiffness; Error sources;
D O I：
10.1016/j.cirpj.2010.05.004
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Atomic Force Acoustic Microscopy (AFAM) is a scanning probe technique for advanced research in nanomechanical properties, using local elasticity to provide direct and non-destructive mapping of Young's modulus and related surface parameters. In this work, an experimental study is presented, addressing the performance of quantitative AFAM characterization. Different influencing factors are analysed, mainly arising from probe characteristics (such as cantilever geometry, force constant and ultimately resonance frequency) and scan settings (speed and sample vibration frequency). Investigations encompassed a commercial instrument equipped with three different probes, featuring different dimensions and mechanical properties. (C) 2010 CIRP.
引用
收藏
页码：49 / 54
页数：6
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