EFFECTS OF CRYSTALLITE ORIENTATION ON ENVIRONMENTAL STABILITY AND LUBRICATION PROPERTIES OF SPUTTERED MOS2 THIN-FILMS

被引：130

|

作者：

FLEISCHAUER, PD

机构：

来源：

ASLE TRANSACTIONS | 1984年 / 27卷 / 01期

关键词：

D O I：

10.1080/05698198408981548

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

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页码：82 / 88

页数：7

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