SPECIAL ISSUE ON MODELING AND SIMULATION OF COLLISIONAL LOW-TEMPERATURE PLASMAS

被引：0
|
作者：
WU, CH
MEYYAPPAN, M
ECONOMOU, DJ
机构：
[1] AUBURN UNIV,ALABAMA MICROELECTR SCI & TECHNOL CTR,AUBURN,AL 36849
[2] SCI RES ASSOCIATES INC,GLASTONBURY,CT 06033
[3] UNIV HOUSTON,DEPT CHEM ENGN,PLASMA PROC LAB,HOUSTON,TX 77204
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 1995年 / 23卷 / 04期
关键词：
D O I：
暂无
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
引用
收藏
页码：501 / 502
页数：2
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