SCANNING NEAR-FIELD OPTIC ATOMIC-FORCE MICROSCOPY

被引：48
|
作者：
MURAMATSU, H [1 ]
CHIBA, N [1 ]
ATAKA, T [1 ]
MONOBE, H [1 ]
FUJIHIRA, M [1 ]
机构：
[1] TOKYO INST TECHNOL,DEPT BIOMOLEC ENGN,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN
来源：
ULTRAMICROSCOPY | 1995年 / 57卷 / 2-3期
关键词：
D O I：
10.1016/0304-3991(94)00125-7
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Design and performance of a scanning near-field optic/atomic-force microscope (SNOAM) is described in this paper. A sharpened and bent optical fiber was used as a near-field optical probe as well as an atomicforce microscope probe in vertical vibrating mode. The SNOAM provided simultaneous topographical and optical imagings in several optical setting modes. Sub-micron levels of chromium patterns on a glass substrate were clearly observed by the SNOAM.
引用
收藏
页码：141 / 146
页数：6
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