ELECTRICAL INTERCONNECTION THROUGH SILICON-WAFER

被引:0
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作者
DUPEUX, T [1 ]
SIBUET, H [1 ]
DAUPHIN, PD [1 ]
机构
[1] CEN,D LETT MEM 85X,F-38041 GRENOBLE,FRANCE
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:C359 / C359
页数:1
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