OPTICALLY ENHANCED OXIDATION OF III-V COMPOUND SEMICONDUCTORS

被引：20
|
作者：
FUKUDA, M
TAKAHEI, K
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 01期
关键词：
D O I：
10.1063/1.335375
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：129 / 134
页数：6
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