VACUUM GAUGES AND PARTIAL-PRESSURE ANALYZERS

被引：0

作者：

TILFORD, CR

机构：

[1] Nat. Inst. of Stand. and Technol., Gaithersburg, MD

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 1993年 / 5卷

关键词：

D O I：

10.1088/0953-8984/5/33A/008

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

This paper briefly reviews the characteristics of several important vacuum instruments; capacitance diaphragm gauges, ionization gauges, spinning rotor gauges, and partial pressure or residual gas analysers.

引用

页码：A81 / A84

页数：4

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