TWO-DIMENSIONAL ION-IMPLANTATION PROFILES FROM ONE-DIMENSIONAL PROJECTIONS

被引：0

|

作者：

GILES, MD ^{[1
]}

GIBBONS, JF ^{[1
]}

机构：

[1] STANFORD UNIV,STANFORD ELECTR LABS,STANFORD,CA 94305

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：C318 / C318

页数：1

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