共 50 条
- [31] Development of a Fast Steering Mirror of Large Diameter [J]. INTEGRATED PHOTONICS: MATERIALS, DEVICES, AND APPLICATIONS IV, 2017, 10249
- [32] Development of a reflectometer for a large EUV mirror in NewSUBARU [J]. PHOTOMASK JAPAN 2015: PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY XXII, 2015, 9658
- [35] SIMPLE KINEMATIC LASER MIRROR MOUNT [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (03): : 548 - &
- [36] SIMPLE, STABLE KINEMATIC MIRROR MOUNT [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1979, 50 (02): : 258 - 258
- [37] Development features in large-range nanoscale coordinate metrology [J]. OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY II, 2008, 6995
- [38] MIRROR MOUNT FOR LONG WAVELENGTH LASERS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (02): : 333 - +
- [39] INTERNAL MIRROR MOUNT FOR GAS LASERS [J]. INSTRUMENTS AND EXPERIMENTAL TECHNIQUES-USSR, 1968, (02): : 439 - &
- [40] Development of a metrology instrument for mapping the crystallographic axis in large optics [J]. PROCEEDINGS OF THE THIRTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1998, : 467 - 470