EFFECT OF THE THERMAL-OXIDATION OF SILICON ON THE ELECTROPHYSICAL CHARACTERISTICS OF THE SIO2/SI STRUCTURE

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作者：
ZAITSEV, NA
SUROVIKOV, MV
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INORGANIC MATERIALS | 1982年 / 18卷 / 12期
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T [工业技术];
学科分类号：
08 ;
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页码：1675 / 1677
页数：3
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