ATOMICALLY CONTROLLED GROWTH OF GAAS/NIAL/GAAS STRUCTURES BY MOLECULAR-BEAM EPITAXY

被引:0
|
作者
HIRONO, S
TANIMOTO, M
INOUE, N
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 02期
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D O I
10.1116/1.587037
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The morphology of molecular-beam epitaxy (MBE) grown GaAs/NiAl/GaAs structures using scanning tunneling microscopy (STM) was investigated. Improving the flatness of the NiAl layer is achieved by improving the wettability of NiAl on GaAs by using a Ni template and increasing the island density by low-temperature growth. This method gives a continuous, flat NiAl film with a mean roughness of one monolayer. A GaAs overlayer with a roughness of two monolayers or less is obtainable by using low-temperature migration enhanced epitaxy (MEE).
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页码:1181 / 1183
页数:3
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