CHARACTERIZATION OF SPUTTERED ZINC-SULFIDE FILMS

被引：11
|
作者：
EMMA, T
MCDONOUGH, M
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词：
D O I：
10.1116/1.572740
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：362 / 364
页数：3
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