EVIDENCE FOR FREE CARBON IN AMORPHOUS OMCVD SILICON-RICH SIXC1-X COATINGS

被引：4
|
作者：
MESTARI, A
MAURY, F
MORANCHO, R
机构：
来源：
JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
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D O I：
10.1051/jphyscol:1989592
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学科分类号：
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页码：765 / 772
页数：8
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