EVIDENCE FOR FREE CARBON IN AMORPHOUS OMCVD SILICON-RICH SIXC1-X COATINGS

被引：4
|
作者：
MESTARI, A
MAURY, F
MORANCHO, R
机构：
来源：
JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
关键词：
D O I：
10.1051/jphyscol:1989592
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：765 / 772
页数：8
相关论文
共 39 条
  • [1] Simulations of structures of amorphous SixC1-x films
    Lan, Huiqing
    Wang, Yang
    Liu, Can
    APPLIED SURFACE SCIENCE, 2012, 258 (06) : 2165 - 2168
  • [2] PHONON DENSITY OF STATES OF AMORPHOUS SIXC1-X
    GUPTA, HC
    REDDY, GS
    TRIPATHI, BB
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1987, 48 (03) : 297 - 298
  • [3] LUMINESCENCE IN PLASMA DEPOSITED AMORPHOUS SIXC1-X ALLOYS
    SUSSMANN, RS
    LAUDER, EH
    JOURNAL DE PHYSIQUE, 1981, 42 (NC4): : 1029 - 1032
  • [4] ORGANO-METALLIC CHEMICAL VAPOR-DEPOSITION OF SILICON-RICH AMORPHOUS SIXC1-X REFRACTORY LAYERS USING SIET4 AS A SINGLE SOURCE
    MAURY, F
    MESTARI, A
    MORANCHO, R
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 109 : 69 - 75
  • [5] PHOTO-LUMINESCENCE IN AMORPHOUS SYSTEM SIXC1-X
    ENGEMANN, D
    FISCHER, R
    KNECHT, J
    APPLIED PHYSICS LETTERS, 1978, 32 (09) : 567 - 568
  • [6] REACTIVE ION ETCHING OF SILICON-CARBIDE (SIXC1-X)
    DARTNELL, NJ
    FLOWERS, MC
    GREEF, R
    ZHU, J
    BLACKBURN, A
    VACUUM, 1995, 46 (04) : 349 - 355
  • [7] PROPERTIES OF FULLY IMPLANTED AMORPHOUS SIXC1-X - H-ALLOYS
    COMPAGNINI, G
    CALCAGNO, L
    FOTI, G
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 978 - 981
  • [8] Two-Photon Absorption-Free Ultrafast Optical Switching in Carbon-Rich SixC1-x Microring
    Huang, Bo-Ji
    Wu, Chung-Lun
    Lin, Yung-Hsiang
    Wang, Huai-Yung
    Tsai, Cheng-Ting
    Cheng, Chih-Hsien
    Chi, Yu-Chieh
    Chang, Po-Han
    Wu, Chih-, I
    Soref, Richard A.
    Lin, Gong-Ru
    ADVANCED MATERIALS TECHNOLOGIES, 2017, 2 (09):
  • [9] COMPOSITION-DEPENDENT STOKES SHIFT OF PHOTO-LUMINESCENCE IN AMORPHOUS SIXC1-X
    MUNEKATA, H
    SHIOZAKI, A
    KUKIMOTO, H
    JOURNAL OF LUMINESCENCE, 1981, 24-5 (NOV) : 43 - 46
  • [10] FTIR and Raman study of rapid thermal annealing and oxidation effects on structural properties of silicon-rich SixC1-x thin films deposited by R. F co-sputtering
    El Khalfi, Abdel-ilah
    Ech-chamikh, Elmaati
    Ijdiyaou, Youssef
    Azizan, Mustapha
    Essafti, Abdelhadi
    Nkhaili, Lahcen
    El Kissani, Abdelkader
    Tomasella, Eric
    VIBRATIONAL SPECTROSCOPY, 2017, 89 : 44 - 48
1234