HIGH-SPEED AUTOMATIC ELLIPSOMETER FOR INDUSTRIAL USES

被引：3
|
作者：
KASAI, T [1 ]
机构：
[1] NIPPON KOGAKU KK,RES LABS,SHINAGAWA KU,TOKYO,JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1976年 / 47卷 / 09期
关键词：
D O I：
10.1063/1.1134814
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1044 / 1048
页数：5
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