HIGH-SPEED AUTOMATIC ELLIPSOMETER FOR INDUSTRIAL USES

被引：3
|
作者：
KASAI, T [1 ]
机构：
[1] NIPPON KOGAKU KK,RES LABS,SHINAGAWA KU,TOKYO,JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1976年 / 47卷 / 09期
关键词：
D O I：
10.1063/1.1134814
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1044 / 1048
页数：5
相关论文
共 50 条
  • [1] AUTOMATIC HIGH-SPEED ELLIPSOMETER
    不详
    BATTELLE TECHNICAL REVIEW, 1967, 16 (02): : 23 - &
  • [2] A HIGH SPEED PRECISION AUTOMATIC ELLIPSOMETER
    CAHAN, BD
    SPANIER, RF
    SURFACE SCIENCE, 1969, 16 : 166 - &
  • [3] HIGH-SPEED RETARDATION MODULATION ELLIPSOMETER
    MORITANI, A
    OKUDA, Y
    KUBO, H
    NAKAI, J
    APPLIED OPTICS, 1983, 22 (16): : 2429 - 2436
  • [4] DISCUSSION OF A HIGH SPEED PRECISION AUTOMATIC ELLIPSOMETER
    ASPNES, DE
    CAHAN, BD
    JERRARD, HG
    GENSHAW, M
    SURFACE SCIENCE, 1969, 16 : 175 - &
  • [5] High-speed ellipsometer and its application to the process line
    Komine, Isamu
    Miyazaki, Takao
    Yamada, Yoshiro
    Kawabata, Shigeo
    Kuwayama, Michio
    NKK Technical Review, 1988, (53): : 36 - 43
  • [6] High-speed Mueller matrix ellipsometer with microsecond temporal resolution
    Zhang, Song
    Jiang, Hao
    Gu, Honggang
    Chen, Xiuguo
    Liu, Shiyuan
    OPTICS EXPRESS, 2020, 28 (08): : 10873 - 10887
  • [7] Development and Calibration of a Vertical High-Speed Mueller Matrix Ellipsometer
    Liu, Jiamin
    Zhang, Song
    Deng, Bowen
    Li, Lei
    Gu, Honggang
    Zhu, Jinlong
    Jiang, Hao
    Liu, Shiyuan
    PHOTONICS, 2023, 10 (09)
  • [8] HIGH-SPEED RECTIFIER USES NO DIODES
    HENDRICKS, P
    EDN, 1995, 40 (07) : 80 - 80
  • [9] USES OF HIGH-SPEED BALL BEARINGS
    SPITSYN, NA
    ATRAS, SG
    RUSSIAN ENGINEERING JOURNAL-USSR, 1968, 48 (11): : 43 - &
  • [10] HIGH-SPEED AUTOMATIC RECORDER
    SEMENYUK, AL
    KHOMTSOV, VV
    PRIBORY I TEKHNIKA EKSPERIMENTA, 1973, (01): : 252 - 254
12345