CHEMICAL VAPOR-DEPOSITION

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作者：

HIROSE, M

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来源：

SEMICONDUCTORS AND SEMIMETALS | 1984年 / 21卷

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TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：109 / 122

页数：14

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