OPTIMUM CHARACTERISTICS OF OPTICAL-SYSTEMS FOR IMAGING ONTO PHOTORESIST

被引:0
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作者
GRAMMATIN, AP
BAGDASAROV, AA
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SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1982年 / 49卷 / 07期
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O43 [光学];
学科分类号
070207 ; 0803 ;
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页码:425 / 428
页数:4
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