OPTIMUM CHARACTERISTICS OF OPTICAL-SYSTEMS FOR IMAGING ONTO PHOTORESIST

被引：0

作者：

GRAMMATIN, AP

BAGDASAROV, AA

机构：

来源：

SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1982年 / 49卷 / 07期

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D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：425 / 428

页数：4

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