LASER-RECRYSTALLIZED POLYSILICON RESISTORS FOR SENSING AND INTEGRATED-CIRCUITS APPLICATIONS

被引：18

作者：

BINDER, J

HENNING, W

OBERMEIER, E

SCHABER, H

CUTTER, D

机构：

[1] FRAUNHOFER INST FESTKORPERTECHNOL,D-8000 MUNICH 60,FED REP GER

[2] SIEMENS AG ZT MUNCHEN,D-8000 MUNICH 83,FED REP GER

来源：

SENSORS AND ACTUATORS | 1983年 / 4卷 / 04期

关键词：

D O I：

10.1016/0250-6874(83)85064-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：527 / 536

页数：10

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