LASER-RECRYSTALLIZED POLYSILICON RESISTORS FOR SENSING AND INTEGRATED-CIRCUITS APPLICATIONS

被引：18
|
作者：
BINDER, J
HENNING, W
OBERMEIER, E
SCHABER, H
CUTTER, D
机构：
[1] FRAUNHOFER INST FESTKORPERTECHNOL,D-8000 MUNICH 60,FED REP GER
[2] SIEMENS AG ZT MUNCHEN,D-8000 MUNICH 83,FED REP GER
来源：
SENSORS AND ACTUATORS | 1983年 / 4卷 / 04期
关键词：
D O I：
10.1016/0250-6874(83)85064-1
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：527 / 536
页数：10
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