OPTICAL MONITORING OF THE ENDPOINT IN THIN-FILM PLASMA-ETCHING

被引：12
|
作者：
BRAGA, ES [1 ]
MENDES, GF [1 ]
FREJLICH, J [1 ]
MAMMANA, AP [1 ]
机构：
[1] UNIV ESTADUAL CAMPINAS,INST FIS,OTICA LAB,BR-13100 CAMPINAS,SP,BRAZIL
来源：
THIN SOLID FILMS | 1983年 / 109卷 / 04期
关键词：
D O I：
10.1016/0040-6090(83)90189-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：363 / 369
页数：7
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