Densification and Thermo-Mechanical Properties of Al2O3-ZrO2 (Y2O3) Composite

被引：2
|
作者：
Kim, Hee Seung [1 ]
Seo, Mi Young [1 ]
Kim, Ik Jin [2 ]
机构：
[1] BIEMT Co LTD, Inst Adv Ceram Semicond, Chungnam 336864, South Korea
[2] Hanseo Univ, Inst Proc & Applicat Inorgan Mat PAIM, Dept Mat Sci & Engn, Chungnam 356706, South Korea
来源：
JOURNAL OF THE KOREAN CERAMIC SOCIETY | 2006年 / 43卷 / 09期
关键词：
ZTA (Zirconia Toughened Alumina); Hardness; Young's modulus; Toughness; Bonding capillary;
D O I：
10.4191/kcers.2006.43.9.515
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The microstructure of ZrO2 toughened Al2O3 ceramics was carefully controlled so as to obtain dense and fine-grained ceramics, thereby improving the properties and reliability of the ceramics for capillary applications in semiconductor bonding technology. Al2O3-ZrO2 (Y2O3) composite was produced via Ceramic Injection Molding (CIM) technology, followed by Sinter-HIP process. Room temperature strength, hardness, Young's modulus, thermal expansion coefficient and toughness were determined, as well as surface strengthening induced by the fine grained homogenous microstructure and the thermal treatment. The changes in alumina/zirconia grain size, sintering condition and HIP treatment were found to be correlated.
引用
收藏
页码：515 / 518
页数：4
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