SILICON TECHNOLOGY IN ION DETECTION - A HIGH-RESOLUTION DETECTOR ARRAY

被引：17
|
作者：
BIRKINSHAW, K
LANGSTAFF, DP
机构：
[1] Department of Physics, University of Wales Aberystwyth, Aberystwyth
来源：
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1994年 / 132卷 / 03期
关键词：
DETECTOR; ARRAY; ION; SILICON; MASS SPECTROMETER;
D O I：
10.1016/0168-1176(93)03940-N
中图分类号：
O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号：
070203 ; 070304 ; 081704 ; 1406 ;
摘要：
A new ion detector array integrated on a silicon chip with a high spatial resolution has been designed at Aberystwyth. Integrated circuits are mounted on a ceramic substrate beneath a microchannel plate electron multiplier giving a small, light, low power, very low noise module. An array containing 384 detectors with a spatial resolution of 25 microns has been fully tested and test results are presented.
引用
收藏
页码：193 / 206
页数：14
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