HYDROGEN CONTENT AND OPTICAL-PROPERTIES OF LPCVD AMORPHOUS-SILICON FILMS

被引：2
|
作者：
MANFREDOTTI, C [1 ]
SCARANO, G [1 ]
DELLAMEA, G [1 ]
ALVAREZ, CR [1 ]
机构：
[1] DIPARTIMENTO FIS,I-53100 PADOVA,ITALY
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷
关键词：
D O I：
10.1016/0022-3093(85)90726-4
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：575 / 578
页数：4
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