PROCESS-CONTROL BY AUTOMATED IN PROCESS WAFER INSPECTION

被引：0

作者：

HARRIS, KL

SANDLAND, P

SINGLETON, RM

机构：

来源：

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1984年 / 470卷

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：253 / 260

页数：8

共 50 条

[1] PROCESS-CONTROL IN WAFER FABRICATION
JOHNSTON, B
[J]. SOLID STATE TECHNOLOGY, 1986, 29 (05) : 195 - 199
[2] ADVANCES IN WAFER PROCESS-CONTROL
SCHUEGRAF, K
[J]. SOLID STATE TECHNOLOGY, 1980, 23 (02) : 87 - 94
[3] INSPECTION OF PROCESS-CONTROL COMPUTERS
GLOEE, G
[J]. TRANSACTIONS OF THE AMERICAN NUCLEAR SOCIETY, 1979, 31 (MAY): : 134 - 135
[4] RADIONUCLIDES FOR PROCESS-CONTROL AND INSPECTION
HADDEN, RJB
[J]. ISOTOPENPRAXIS, 1987, 23 (01): : 1 - 12
[5] PRELUDE TO AUTOMATED PROCESS-CONTROL
PETER, JW
[J]. SPE JOURNAL, 1972, 28 (08): : 57 - &
[6] PHOTOLUMINESCENCE MAPPING IN INSPECTION AND PROCESS-CONTROL
HENNESSY, J
MINER, C
MOORE, C
[J]. PHOTONICS SPECTRA, 1990, 24 (04) : 91 - &
[7] WAFER STEPPER CHARACTERIZATION AND PROCESS-CONTROL TECHNIQUES
CURRY, SC
FRIEDBERG, CB
[J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1982, 334 : 105 - 110
[8] AUTOMATED PROCESS-CONTROL FOR PULPSTONE GRINDERS - CAMEL PROCESS
ALEXANDER, DK
[J]. PULP & PAPER-CANADA, 1973, 74 (02) : 77 - 84
[9] A NEW STRATEGY FOR SMT INSPECTION AND PROCESS-CONTROL
MALLOY, D
[J]. PROCEEDINGS OF THE TECHNICAL CONFERENCE : NINTH ANNUAL INTERNATIONAL ELECTRONICS PACKAGING CONFERENCE, VOLS 1 AND 2, 1989, : 1128 - 1137
[10] AUTOMATED SINTERING MACHINE PROCESS-CONTROL SYSTEM
ISHCHENKO, AD
MONYA, GM
BENSMAN, LG
ZEVIN, SL
GREKOV, VV
[J]. STEEL IN THE USSR, 1989, 19 (09): : 377 - 378